Microstructure of multilayer Si/SiO2/Ti/Pt/PZT compositions

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作者：
Zhigalina, O.M.
Burmistrova, P.V.
Vasiliev, A.L.
Roddatis, V.V.
Vorotilov, K.A.
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Izvestiya Akademii Nauk. Ser. Fizicheskaya | 2001年 / 65卷 / 09期
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页码：1272 / 1276
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