CHEMICALLY ACTIVE COMPONENTS OF A BROMINE-ETHANOL ETCHANT FOR SEMICONDUCTOR MATERIALS.

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作者：

Pinyacheva, T.M.

Komisarchik, M.Sh.

Orlov, Yu.F.

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Journal of applied chemistry of the USSR | 1985年 / 58卷 / 11 pt 2期

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页码：2406 / 2409

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[1] CHEMICALLY ACTIVE COMPONENTS OF A BROMINE ETHANOL ETCHANT FOR SEMICONDUCTOR-MATERIALS
PINYACHEVA, TM
KOMISARCHIK, MS
ORLOV, YF
JOURNAL OF APPLIED CHEMISTRY OF THE USSR, 1985, 58 (11): : 2406 - 2409
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