SOI (Silicon-on-insulator) - materials and devices

被引：0

作者：

Jakubowski, A. ^{[1
]}

Jurczak, M. ^{[1
]}

Lukasiak, L. ^{[1
]}

机构：

[1] Warsaw Inst of Technology, Warszawa, Poland

来源：

Electron Technology (Warsaw) | 1996年 / 29卷 / 2-3期

关键词：

Dynamic random access memory (DRAM) - Low power supply devices - Smart power devices;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The flexibility provided by full isolation of the SOI substrates and almost ideal properties of the SOI MOSFET have made SOI ICs very attractive for a number of applications. Although high prices of the SOI materials, SOI has potential to become a production-worthy technology, especially for very high-speed ULSI CMOS, low power supply devices, DRAMs and smart power devices due to process simplicity, easier scaling and increased packing density. In this paper the SOI substrates fabrication methods as well as some SOI devices and their applications are reviewed.

引用

页码：191 / 195

共 50 条

[31] Electron transport in silicon-on-insulator devices
Gámiz, F
Roldán, JB
López-Villanueva, JA
Cartujo-Cassinello, P
Carceller, JE
Cartujo, P
Jiménez-Molinos, F
[J]. SOLID-STATE ELECTRONICS, 2001, 45 (04) : 613 - 620
[32] Properties of silicon-on-insulator structures and devices
Popov, VP
Antonova, AI
Frantsuzov, AA
Safronov, LN
Feofanov, GN
Naumova, OV
Kilanov, DV
[J]. SEMICONDUCTORS, 2001, 35 (09) : 1030 - 1037
[33] An optical board approach based on SOI (silicon-on-insulator)
Bruns, Juergen
Mitze, Torsten
Zimmermann, Lars
Voigt, Karsten
Schnarrenberger, Martin
Petermann, Klaus
[J]. ICTON 2007: PROCEEDINGS OF THE 9TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, VOL 1, 2007, : 179 - +
[34] Silicon-On-Insulator (SOI) wafer fabrication for MEMS applications
KotiReddy, BR
Rao, PRS
DasGupta, A
Bhat, KN
[J]. SMART MATERIALS, STRUCTURES, AND SYSTEM, PTS 1 AND 2, 2003, 5062 : 840 - 845
[35] TRANSCONDUCTANCE OF SILICON-ON-INSULATOR (SOI) MOSFET'S.
Colinge, Jean-Pierre
[J]. Electron device letters, 1985, EDL-6 (11): : 573 - 574
[36] Transient performance of Silicon-On-Insulator (SOI) Phase Modulator
Hanim, A. R.
Hazura, H.
Mardiana, B.
Shaari, Sahbudin
Menon, P. S.
[J]. ENABLING SCIENCE AND NANOTECHNOLOGY, 2011, 1341 : 234 - 236
[37] Kinetics of {311} defect dissolution in silicon-on-insulator (SOI)
Saavedra, AF
Jones, KS
Law, ME
Chan, KK
[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 107 (02): : 198 - 203
[38] The future of silicon-on-insulator (SOI) technology in microelectronic systems
Lemnios, ZJ
Radack, DJ
Zolper, JC
[J]. 2004 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS, 2004, : 9 - 13
[39] Fabrication of Silicon-on-Insulator (SOI) and High-k Materials Using Plasma Technology
Chu, Paul K.
[J]. 2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4, 2008, : 757 - 760
[40] Feasibility of smart cards in Silicon-On-Insulator (SOI) technology
Néve, A
Flandre, D
Quisquater, JJ
[J]. PROCEEDINGS OF THE USENIX WORKSHOP ON SMARTCARD TECHNOLOGY (SMARTCARD '99), 1999, : 1 - 7

← 1 2 3 4 5 →