Optical ion energy measurements in a radio-frequency-induction plasma source

被引：0
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作者：
O'Neill, James A. [1 ]
Barnes, Michael S. [1 ]
Keller, John H. [1 ]
机构：
[1] IBM General Technology Div, Hopewell Junction, United States
来源：
Journal of Applied Physics | 1993年 / 73卷 / 04期
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页码：1621 / 1626
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