Optical ion energy measurements in a radio-frequency-induction plasma source

被引：0

作者：

O'Neill, James A. ^{[1
]}

Barnes, Michael S. ^{[1
]}

Keller, John H. ^{[1
]}

机构：

[1] IBM General Technology Div, Hopewell Junction, United States

来源：

Journal of Applied Physics | 1993年 / 73卷 / 04期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1621 / 1626

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