Effect of adding gas ions to a beam for deposition of boron nitride films by the ion beam and vapor deposition method

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Andoh, Y.
Nishiyama, S.
Kirimura, H.
Mikami, T.
Ogata, K.
Fujimoto, F.
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Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1991年 / 59-60卷 / pt 1期
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