Monitoring particles in production vacuum process equipment. The nature of particle generation

被引：0
|
作者：
机构：
来源：
Borden, Peter | 1600年 / 08期
关键词：
Monitoring Strategy - Particle Generation - Production Vacuum Process Generation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 31 条
  • [21] Turbine blades production technique equipment built with a glance of high-gradient directional crystallization process nature
    Echin, Alexander
    Bondarenko, Yury
    EUROSUPERALLOYS 2014 - 2ND EUROPEAN SYMPOSIUM ON SUPERALLOYS AND THEIR APPLICATIONS, 2014, 14
  • [22] Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process”
    Changmin Kim
    Sungwon Choi
    Jeongan Choi
    Hyunho Seok
    Keun-Oh Park
    Youngho Cho
    Kihong Park
    Sanghyuck Jeon
    Hyeong-U Kim
    Taesung Kim
    Journal of Mechanical Science and Technology, 2023, 37 : 2131 - 2131
  • [23] Particle filter-based monitoring scheme for simulated bio-ethylene production process
    Ferreira Salardani, Luciana Souza
    Albuquerque, Lorrane Pains
    Justino da Costa, Jose Mir
    da Silva, Wellington Betencurte
    Sampaio Dutra, Julio Cesar
    INVERSE PROBLEMS IN SCIENCE AND ENGINEERING, 2019, 27 (05) : 648 - 668
  • [24] Data-Driven Modeling of the Spray Drying Process. Process Monitoring and Prediction of the Particle Size in Pharmaceutical Production
    Lopez, Carlos Andre Munoz
    Peeters, Kristin
    Van Impe, Jan
    ACS OMEGA, 2024, 9 (24): : 25678 - 25693
  • [25] Change in particle morphology during production process of magnetic iron fine particles and its effect on the product coercivity
    Hilmawan, E
    Mori, S
    Kumita, M
    Takako, Y
    KAGAKU KOGAKU RONBUNSHU, 2001, 27 (03) : 392 - 394
  • [26] Monitoring method for deposited film causing particles in mass-production plasma etching process using a load impedance monitoring system
    Kasashima, Yuji
    Uesugi, Fumihiko
    INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) 2016 PROCEEDINGS OF TECHNICAL PAPERS, 2016,
  • [27] Production of meso- and giga-porous zirconia particles - An improved multi-step particle aggregation process
    Pattanayak, Abhinandan
    Subramanian, Anuradha
    POWDER TECHNOLOGY, 2009, 192 (03) : 359 - 366
  • [28] PHOTOCARRIER GENERATION PROCESS OF PHTHALOCYANINE PARTICLES DISPERSED IN A POLYMER - EFFECTS OF PIGMENT PARTICLE-SIZE, POLYMER MATRIX AND ADDITION OF FINE GAMMA-ALUMINA PARTICLES
    SAITO, T
    KAWANISHI, T
    KAKUTA, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (7A): : L1182 - L1185
  • [29] Instantaneous generation of many flaked particles by impulsive force of electric field stress acting on inner wall of mass-production plasma etching equipment
    Kasashima, Yuji
    Nabeoka, Natsuko
    Uesugi, Fumihiko
    Japanese Journal of Applied Physics, 2013, 52 (6 PART 1)
  • [30] Instantaneous Generation of Many Flaked Particles by Impulsive Force of Electric Field Stress Acting on Inner Wall of Mass-Production Plasma Etching Equipment
    Kasashima, Yuji
    Nabeoka, Natsuko
    Uesugi, Fumihiko
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2013, 52 (06)
1234