Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures

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Kakuta, Shigeru
Petrovic, Zoran Lj.
Tochikubo, Fumiyoshi
Makabe, Toshiaki
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Journal of Applied Physics | 1993年 / 74卷 / 08期
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