Wafer bonding of gallium arsenide on sapphire

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Max-Planck-Inst of Microstructure, Physics, Halle, Germany ^{[1
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Appl Phys A | / 6卷 / 533-537期

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[31] THINNED SILICON LAYERS ON OXIDE FILM, QUARTZ AND SAPPHIRE BY WAFER BONDING
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