Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors

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Nagy, G.
Levy, M.
Scarmozzino, R.
Osgood, R.M. Jr.
Dai, H.
Smalley, R.E.
Michaels, C.A.
Flynn, G.W.
McLane, G.F.
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Applied Physics Letters | 1998年 / 73卷 / 04期
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