Shear-force sensitive silicon sensor

被引：0
|
作者：
Wang, Lin [1 ]
Beebe, David J. [1 ]
机构：
[1] Dept. of Elec. and Comp. Engineering, Beckman Inst. Adv. Sci. and Technol., Univ. Illinois at Urbana-Champaign, 405 N. Mathews Avenue, Urbana, IL 61801, United States
来源：
American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC | 1999年 / 67卷
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页码：759 / 763
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