Measurement of Flatness Deviation with a Real-Time Interferometer.

被引：0
|
作者：
Koerner, K. [1 ]
Puder, J. [1 ]
机构：
[1] Akad der Wissenschaften der DDR, East Ger, Akad der Wissenschaften der DDR, East Ger
来源：
Feingeratetechnik Berlin | 1988年 / 37卷 / 01期
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D O I：
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学科分类号：
摘要：
12
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页码：15 / 17
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