共 50 条
- [21] AMORPHOUS TA-SI-N THIN-FILM ALLOYS AS DIFFUSION BARRIER IN AL/SI METALLIZATIONS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 3006 - 3010
- [22] Automatic measurement system for degradation analysis in thin-film AlCu metallizations IMTC/2000: PROCEEDINGS OF THE 17TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE: SMART CONNECTIVITY: INTEGRATING MEASUREMENT AND CONTROL, 2000, : 1572 - 1577
- [25] THICKNESS DEPENDENCE OF THIN-FILM CONDUCTIVITY PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 114 (02): : 545 - 550
- [27] THIN-FILM THICKNESS MONITOR SHUTTER REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (04): : 546 - 547
- [30] ENVIRONMENTAL CORROSION - THIN-FILM MATERIALS MICROPROCESSING AND MICROPROGRAMMING, 1987, 19 (05): : 425 - 425