Role of carbon in LEC Sl-GaAs

被引：0
|
作者：
Nakamura, Yoshio [1 ]
Ohtsuki, Yasuo [1 ]
Itoh, Yoshiteru [1 ]
Kikuta, Toshio [1 ]
Kikawa, Junjiro [1 ]
Kashiwayanagi, Yuzo [1 ]
机构：
[1] Furukawa Electric Co, Japan
来源：
Furukawa Review | 1988年 / 06期
关键词：
Carbon Concentration Region - Shallow Acceptor - Surface Resistivity - Thermal Conversion - Thermal Stability;
D O I：
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学科分类号：
摘要：
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页码：13 / 16
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