Theoretical and experimental analysis of coupled vibration of a microcantilever array

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作者：
Hosaka, Hiroshi [1 ]
Itao, Kiyoshi [1 ]
机构：
[1] Department of Environmental Studies, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan
来源：
American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC | 1999年 / 67卷
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页码：149 / 156
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