Micro machining with excimer laser

被引：0
|
作者：
Dickmann, Klaus
Gerlach, Karl-Heinz
Jersch, Johann
Hildenhagen, Jens
机构：
[1] Universität Hannover, Germany
[2] Gebiet Lasertechnik, Fachhochschule Münster, Germany
[3] Universität Münster, Germany
[4] LFM Laserzentrum, Fachhochschule Münster, Germany
[5] Univ. Novosibirsk/Rußland, Laserzentrum der FH Münster, Germany
[6] FH Münster, LFM, Germany
来源：
F and M; Feinwerktechnik, Mikrotechnik, Messtechnik | 1998年 / 106卷 / 03期
关键词：
Excimer lasers - Imaging techniques - Laser ablation - Lighting - Scanning electron microscopy;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：138 / 141
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