Art and science of thin-film coating: a progress report

被引：0
|
作者：
Haaland, Peter [1 ]
McKibben, James [1 ]
Parodi, Michael [1 ]
机构：
[1] Semiconductor Systems Inc, Fremont, United States
来源：
Solid State Technology | 1995年 / 38卷 / 04期
关键词：
714.2 Semiconductor Devices and Integrated Circuits - 813.1 Coating Techniques - 813.2 Coating Materials - 921.2 Calculus - 931.1 Mechanics;
D O I：
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学科分类号：
摘要：
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