Art and science of thin-film coating: a progress report

被引：0

|

作者：

Haaland, Peter ^{[1
]}

McKibben, James ^{[1
]}

Parodi, Michael ^{[1
]}

机构：

[1] Semiconductor Systems Inc, Fremont, United States

来源：

Solid State Technology | 1995年 / 38卷 / 04期

关键词：

714.2 Semiconductor Devices and Integrated Circuits - 813.1 Coating Techniques - 813.2 Coating Materials - 921.2 Calculus - 931.1 Mechanics;

D O I：

暂无

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学科分类号：

摘要：

9

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