Depth analysis of oxygen and gold in thin film semiconductor structures using RBS, AES, SIMS and resonant scattering

被引：0
|
作者：
Ras, H.A. [1 ]
Pretorius, R. [1 ]
机构：
[1] Univ of Stellenbosch, South Africa
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1988年 / B35卷 / 3-4期
关键词：
Depth Analysis - RBS Depth Profiling - Resonant Scattering - Rutherford Backscattering - Silicide Formation - SIMS Analysis;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：488 / 494
相关论文
共 50 条
  • [31] Resonant inelastic x-ray scattering study of bond order and spin excitations in nickelate thin-film structures
    Fuersich, K.
    Lu, Y.
    Betto, D.
    Bluschke, M.
    Porras, J.
    Schierle, E.
    Ortiz, R.
    Suzuki, H.
    Cristiani, G.
    Logvenov, G.
    Brookes, N. B.
    Haverkort, M. W.
    Le Tacon, M.
    Benckiser, E.
    Minola, M.
    Keimer, B.
    PHYSICAL REVIEW B, 2019, 99 (16)
  • [32] Chemical selective microstructural analysis of thin film using resonant x-ray reflectivity
    Nayak, Maheswar
    Lodha, G. S.
    JOURNAL OF APPLIED PHYSICS, 2013, 114 (02)
  • [33] Fabrication and characterization of magnetically tunable metal-semiconductor schottky diode using barium hexaferrite thin film on gold
    Kaur, Jotinder
    Sharma, Vinay
    Sharma, Vipul
    Veerakumar, V.
    Kuanr, Bijoy K.
    AIP ADVANCES, 2016, 6 (05):
  • [34] Depth strain profile with sub-nm resolution in a thin silicon film using medium energy ion scattering
    Jalabert, D.
    Pelloux-Gervais, D.
    Beche, A.
    Hartmann, J. M.
    Gergaud, P.
    Rouviere, J. L.
    Canut, B.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2012, 209 (02): : 262 - 265
  • [35] Improved quantitative analysis of Cu(In,Ga)Se2 thin films using MCs+-SIMS depth profiling
    Lee, Jihye
    Kim, Seon Hee
    Lee, Kang-Bong
    Min, Byoung Koun
    Lee, Yeonhee
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2014, 115 (04): : 1355 - 1364
  • [36] DEPTH PROFILE COMPOSITION STUDIES OF THIN-FILM CDS-CU2S SOLAR-CELLS USING XPS AND AES
    BHIDE, VG
    SALKALACHEN, S
    RASTOGI, AC
    RAO, CNR
    HEGDE, MS
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (09) : 1647 - &
  • [37] Improved quantitative analysis of Cu(In,Ga)Se2 thin films using MCs+-SIMS depth profiling
    Jihye Lee
    Seon Hee Kim
    Kang-Bong Lee
    Byoung Koun Min
    Yeonhee Lee
    Applied Physics A, 2014, 115 : 1355 - 1364
  • [38] Characterization of advanced ALD-based thin film barriers for organic electronics using ToF-SIMS analysis
    Terlier, T.
    Maindron, T.
    Barnes, J. -P.
    Leonard, D.
    ORGANIC ELECTRONICS, 2018, 59 : 21 - 26
  • [39] Topographic measurement of buried thin-film interfaces using a grazing resonant soft x-ray scattering technique
    Gann, Eliot
    Watson, Anne
    Tumbleston, John R.
    Cochran, Justin
    Yan, Hongping
    Wang, Cheng
    Seok, Jaewook
    Chabinyc, Michael
    Ade, Harald
    PHYSICAL REVIEW B, 2014, 90 (24):
  • [40] Probing the Internal Microstructure of Polyamide Thin-Film Composite Membranes Using Resonant Soft X-ray Scattering
    Culp, Tyler E.
    Ye, Dan
    Paul, Mou
    Roy, Abhishek
    Behr, Michael J.
    Jons, Steve
    Rosenberg, Steve
    Wang, Cheng
    Gomez, Esther W.
    Kumar, Manish
    Gomez, Enrique D.
    ACS MACRO LETTERS, 2018, 7 (08): : 927 - 932
12345