Silicon wafer orientation dependence of metal oxide semiconductor device reliability

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[1] Nakamura, Kou
[2] Ohmi, Kazuyuki
[3] Yamamoto, Kazuma
[4] Makihara, Koji
[5] Ohmi, Tadahiro
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Nakamura, Kou | 1600年 / Publ by JJAP, Minato-ku, Japan卷 / 33期
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MOSFET devices;
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