AlN thin films deposition by laser ablation of Al target in nitrogen reactive atmosphere

被引：0
|
作者：
Verardi, P.
Dinescu, M.
Gerardi, C.
Mirenghi, L.
Sandu, V.
机构：
来源：
Applied Surface Science | 1997年 / 109-110卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：371 / 375
相关论文
共 50 条
  • [31] LASER REACTIVE ABLATION OF THIN NITRIDE FILMS
    DANNA, E
    DEGIORGI, ML
    LEGGIERI, G
    LUCHES, A
    MAJNI, G
    MARTINO, M
    MIHAILESCU, IN
    MENGUCCI, P
    JOURNAL DE PHYSIQUE IV, 1994, 4 (C4): : 51 - 54
  • [32] Deposition of cubic GaN films by reactive laser ablation of liquid Ga target in ammonia
    Lee, IH
    Park, SM
    BULLETIN OF THE KOREAN CHEMICAL SOCIETY, 2000, 21 (11) : 1065 - 1066
  • [33] Reactive partially ionized beam deposition of AlN thin films
    Feng, JY
    Xie, JQ
    Mo, QW
    MATERIALS LETTERS, 1997, 33 (3-4) : 133 - 136
  • [34] DEPOSITION OF ALN THIN-FILMS BY MAGNETRON REACTIVE SPUTTERING
    GEROVA, EV
    IVANOV, NA
    KIROV, KI
    THIN SOLID FILMS, 1981, 81 (03) : 201 - 206
  • [35] Reactive DC sputter deposition and charactersation of AlN thin films
    Nyawo, T. G.
    Ndwandwe, O. M.
    PROCEEDINGS OF SAIP2012: THE 57TH ANNUAL CONFERENCE OF THE SOUTH AFRICAN INSTITUTE OF PHYSICS, 2012, : 180 - 185
  • [36] Pulsed laser ablation and deposition of thin films
    Ashfold, MNR
    Claeyssens, F
    Fuge, GM
    Henley, SJ
    CHEMICAL SOCIETY REVIEWS, 2004, 33 (01) : 23 - 31
  • [37] Pulsed laser ablation and deposition of thin films
    Catherinot, A
    Champeaux, C
    Angleraud, B
    Marchet, P
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1998, 53 (287): : 284 - 302
  • [38] Magnetostrictive thin films by laser ablation deposition
    Jenner, AG
    Stone, LA
    Snelling, HV
    JOURNAL OF ALLOYS AND COMPOUNDS, 1997, 258 (1-2) : 138 - 142
  • [39] Deposition of silicon nitride films by pulsed laser ablation of the Si target in nitrogen gas
    Umezu, I
    Kohno, K
    Yamaguchi, T
    Sugimura, A
    Inada, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (01): : 30 - 32
  • [40] Laser reactive ablation: One step procedure for the synthesis and deposition of compound thin films
    Dinescu, M
    Chitica, N
    Teodorescu, VS
    Lita, A
    Luches, A
    Martino, M
    Perrone, A
    Gartner, M
    LASER PROCESSING: SURFACE TREATMENT AND FILM DEPOSITION, 1996, 307 : 809 - 821
12345