Recent deposition techniques of DLC and diamond films and their properties

被引：0
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作者：
Tanaka, Akihiro [1 ]
机构：
[1] Res. Ctr. for Adv. Carbon Materials, Natl. Inst. Adv. Indust. Sci. T., 1-1, Higashi 1-chome, Tsukuba-shi, Ibaraki 305-8565, Japan
来源：
Toraibarojisuto/Journal of Japanese Society of Tribologists | 2002年 / 47卷 / 11期
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页码：802 / 808
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