Structure and properties of the diamond like carbon films produced by low-energy ion beam deposition

被引：0
|
作者：
Lin, Xigang [1 ]
Yong, Zhihua [1 ]
Liu, Wei [1 ]
Deng, Ming [1 ]
机构：
[1] Sichuan Union Univ, Chengdu, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 1997年 / 28卷 / 01期
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(Edited Abstract)
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页码：84 / 88
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