Structure and properties of the diamond like carbon films produced by low-energy ion beam deposition

被引：0
|
作者：
Lin, Xigang [1 ]
Yong, Zhihua [1 ]
Liu, Wei [1 ]
Deng, Ming [1 ]
机构：
[1] Sichuan Union Univ, Chengdu, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 1997年 / 28卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：84 / 88
相关论文
共 50 条
  • [1] DEPOSITION OF DIAMOND-LIKE CARBON-FILMS BY LOW-ENERGY ION-BEAM AND DC MAGNETRON SPUTTERING
    SINGH, A
    LAVIGNE, P
    SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3): : 188 - 200
  • [2] STRUCTURE AND PROPERTIES OF AMORPHOUS DIAMOND-LIKE CARBON-FILMS PRODUCED BY ION-BEAM-ASSISTED PLASMA DEPOSITION
    CHEN, J
    CONRAD, JR
    DODD, RA
    JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 1993, 2 (06) : 839 - 842
  • [3] DC CONDUCTION IN DIAMOND-LIKE CARBON-FILMS OBTAINED BY LOW-ENERGY CLUSTER BEAM DEPOSITION
    PAILLARD, V
    MEAUDRE, M
    MELINON, P
    DUPUIS, V
    PEREZ, JP
    VIGNOLI, S
    PEREZ, A
    MEAUDRE, R
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 191 (1-2) : 174 - 183
  • [4] Structure of carbon nitride films prepared by mass-separated low-energy ion beam deposition
    Yamamoto, K
    Watanabe, T
    Wazumi, K
    Koga, Y
    DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 1061 - 1065
  • [5] Ion beam energy effects on structure and properties of SiOx doped diamond-like carbon films
    Meskinis, S.
    Gudaitis, R.
    Slapikas, K.
    Tamulevicius, S.
    Andrulevicius, M.
    Guobiene, A.
    Puiso, J.
    Niaura, G.
    SURFACE & COATINGS TECHNOLOGY, 2008, 202 (11): : 2328 - 2331
  • [6] DIAMOND-LIKE CARBON-FILMS OBTAINED BY LOW-ENERGY CLUSTER BEAM DEPOSITION - EVIDENCE OF A MEMORY EFFECT OF THE PROPERTIES OF FREE CARBON CLUSTERS
    PAILLARD, V
    MELINON, P
    DUPUIS, V
    PEREZ, JP
    PEREZ, A
    CHAMPAGNON, B
    PHYSICAL REVIEW LETTERS, 1993, 71 (25) : 4170 - 4173
  • [7] Structure and properties of diamond-like carbon thin films synthesized by biased target ion beam deposition
    Niakan, H.
    Yang, Q.
    Szpunar, J. A.
    SURFACE & COATINGS TECHNOLOGY, 2013, 223 : 11 - 16
  • [8] Mechanical properties of nanostructured diamond-like carbon films synthesized by low energy cluster beam deposition
    Paillard, V.
    Melinon, P.
    Perez, J.P.
    Dupuis, V.
    Perez, A.
    Loubet, J.L.
    Pascal, H.
    Tonck, A.
    Fallavier, M.
    Nanostructured Materials, 1994, 4 (06): : 759 - 767
  • [9] Ion beam energy effects on structure and properties of diamond like carbon films deposited by closed drift ion source
    Meskinis, S.
    Kopustinskas, V.
    Tamuleviciene, A.
    Tamulevicius, S.
    Niaura, G.
    Jankauskas, J.
    Gudaitis, R.
    VACUUM, 2010, 84 (09) : 1133 - 1137
  • [10] STRUCTURAL INVESTIGATION OF LOW-ENERGY ION-BEAM DEPOSITED DIAMOND-LIKE FILMS
    PATERSON, MJ
    ORRMANROSSITER, KG
    SOOD, DK
    BHARGAVA, SK
    DIAMOND AND RELATED MATERIALS, 1993, 2 (11) : 1439 - 1444
12345