Properties of carbon films prepared by magnetron sputtering of woodceramics

被引：0
|
作者：
Kasai, Kiyokazu [1 ]
Endo, Hiroyuki [1 ]
Shibata, Kiyotaka [2 ]
机构：
[1] Department of Electronics, Aomori Polytechnic College, Goshogawara-shi, Aomori 037-0002, Japan
[2] Department of Electronics, Ibaraki Polytechnic College, 864-4, Suifu-cho, Mito-shi 310-0005, Japan
来源：
Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan | 1999年 / 107卷 / 1248期
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页码：748 / 751
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