共 50 条
- [43] FORMATION OF STABLE MOSI2/POLY-SI FILMS BY RAPID THERMAL ANNEALING PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1987, 100 (01): : 199 - 206
- [44] Kinetics of structural and phase transformations in thin SiOx films in the course of a rapid thermal annealing Semiconductors, 2005, 39 : 1197 - 1203
- [48] The role of excess Si content on the number of Si-nanoclusters/Er ions couplings of Er doped SiOx thin films 2007 4TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, 2007, : 102 - +