Measurement of molecular film contamination using surface acoustic wave microbalances

被引：0
|
作者：
Luey, Kenneth [1 ]
Fay, Michael [2 ]
Sly, Rusty [3 ]
机构：
[1] Aerospace Corporation, El Segundo, CA, United States
[2] Northrop Grumman Space Systems Division, Azusa, CA, United States
[3] Northrop Grumman Space Technology, Redondo Beach, CA, United States
来源：
Journal of the IEST | 2004年 / 47卷 / 02期
关键词：
D O I：
10.17764/jiet.47.2.u7j41141n4g824l5
中图分类号：
学科分类号：
摘要：
10
引用
收藏
页码：25 / 38
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