Highly oriented rutile-type TiO2 films synthesized by ion beam enhanced deposition

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作者：
Zhang, Feng
Zheng, Zhihong
Ding, Xingzhao
Mao, Yingjun
Chen, Yu
Zhou, Zhuyao
Yang, Shiqi
Liu, Xianghuai
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 1997年 / 15卷 / 04期
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