共 50 条
- [33] STATISTICAL PROCESS-CONTROL MASK TECHNOLOGY FOR MICROELECTRONIC COMPONENTS, 1989, 795 : 87 - 95
- [37] Multivariate Statistical Process Control in Etching Process CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2010 (CSTIC 2010), 2010, 27 (01): : 985 - 991
- [38] Applying statistical process control to the repair process 2006 IEEE AUTOTESTCON, VOLS 1 AND 2, 2006, : 314 - 318