Fabrication of Ga liquid metal ion source

被引：0
|
作者：
Dong, Guifang [1 ]
Yuan, Zhongyuan [1 ]
Wang, Jianru [1 ]
Ying, Genyu [1 ]
Zhang, Keqian [1 ]
机构：
[1] Tsinghua Univ, Beijing, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1998年 / 03期
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摘要：
(Edited Abstract)
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页码：42 / 45
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