Fabrication of Ga liquid metal ion source

被引：0

作者：

Dong, Guifang ^{[1
]}

Yuan, Zhongyuan ^{[1
]}

Wang, Jianru ^{[1
]}

Ying, Genyu ^{[1
]}

Zhang, Keqian ^{[1
]}

机构：

[1] Tsinghua Univ, Beijing, China

来源：

Weixi Jiagong Jishu/Microfabrication Technology | 1998年 / 03期

关键词：

D O I：

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中图分类号：

学科分类号：

摘要：

(Edited Abstract)

引用

页码：42 / 45

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