Rate limiting mechanism of transition metal gettering in multicrystalline silicon

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作者：
McHugo, S.A. [1 ]
Thompson, A.C. [1 ]
Imaizumi, M. [1 ]
Hieslmair, H. [1 ]
Weber, E.R. [1 ]
机构：
[1] Lawrence Berkeley Natl Lab, Berkeley, United States
来源：
Materials Science Forum | 1997年 / 258-263卷 / pt 3期
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页码：1795 / 1800
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