Radiation chemistry of poly(lactides) as new polymer resists for the LIGA process

被引：0
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作者：
Wollersheim, O. [1 ]
Zumaque, H. [1 ]
Hormes, J. [1 ]
Langen, J. [1 ]
Hoessel, P. [1 ]
Haeussling, L. [1 ]
Hoffman, G. [1 ]
机构：
[1] Physikalisches Inst der Universitaet, Bonn, Bonn, Germany
来源：
| 1600年 / Institute of Physics Publishing Ltd, Bristol, United Kingdom卷 / 04期
关键词：
Galvanoplating - Irradiation chamber - Poly lactides;
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