DEVELOPMENT OF A THREE-DIMENSIONAL NONCONTACT DIGITAL OPTICAL PROFILER.

被引：0
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作者：
Wyant, J.C. [1 ]
Koliopoulos, C.L. [1 ]
Bhushan, B. [1 ]
Basila, D. [1 ]
机构：
[1] Univ of Arizona, Optical Sciences, Cent, Tucson, AZ, USA, Univ of Arizona, Optical Sciences Cent, Tucson, AZ, USA
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| 1600年 / 108期
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SURFACES
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