FORMATION OF CUBIC BORON NITRIDE FILMS BY BORON EVAPORTION AND NITROGEN ION BEAM BOMBARDMENT.

被引:0
|
作者
Satou, Mamoru
Fujimoto, Fuminori
机构
关键词
D O I
暂无
中图分类号
学科分类号
摘要
5
引用
收藏
页码:171 / 172
相关论文
共 50 条
  • [31] Effects of ion beam energy on the formation of cubic boron nitride thin films by pulsed Nd:YAG laser deposition
    Kawasaki, H
    Doi, K
    Hiraishi, S
    Suda, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (7B): : 4525 - 4527
  • [32] Growth of cubic boron nitride films on Si by ion beam assisted deposition at the high temperatures
    Deyneka, N
    Zhang, XW
    Boyen, HG
    Ziemann, P
    Banhart, E
    DIAMOND AND RELATED MATERIALS, 2004, 13 (03) : 473 - 481
  • [33] Growth mechanism of cubic boron nitride thin films by ion beam assist sputter deposition
    Park, KS
    Lee, DY
    Kim, KJ
    Moon, DW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (03): : 1041 - 1047
  • [34] Nitrogen ion beam-assisted pulsed laser deposition of boron nitride films
    Angleraud, B
    Cahoreau, M
    Jauberteau, I
    Aubreton, J
    Catherinot, A
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) : 3398 - 3403
  • [36] Adhered property of cubic boron nitride thin films and cutting property by cubic boron nitride thin films
    Noma, Masao
    Komatsu, Eiji
    Tokoro, Toshio
    Ogawa, Keiji
    Nakagawa, Heisaburo
    Journal of the Vacuum Society of Japan, 2008, 51 (06) : 392 - 396
  • [37] Boron-carbon-nitrogen films synthesized by laser ablation under ion beam bombardment
    Ren, ZM
    Du, YC
    Ying, ZF
    Li, FM
    Lin, J
    Ren, YZ
    Zong, XF
    MATERIALS CHEMISTRY AND PHYSICS, 1997, 50 (01) : 98 - 101
  • [38] Formation of microcracks in cubic boron nitride
    Aki, M
    Ohno, Y
    Kohno, H
    Takeda, S
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 2000, 80 (03): : 747 - 758
  • [39] The enthalpy of formation of cubic boron nitride
    Tomaszkiewicz, I
    POLISH JOURNAL OF CHEMISTRY, 2002, 76 (08) : 1163 - 1173
  • [40] Turbostractic boron nitride produced by ion bombardment
    Wang, ZX
    Wang, WM
    Ruan, ML
    Xu, XJ
    HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION, 2000, 24 (11): : 1055 - 1059