FORMATION OF CUBIC BORON NITRIDE FILMS BY BORON EVAPORTION AND NITROGEN ION BEAM BOMBARDMENT.

被引：0
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作者：
Satou, Mamoru
Fujimoto, Fuminori
机构：
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1983年 / 22卷 / 03期
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摘要：
5
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页码：171 / 172
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