CHARACTERIZATION OF mu c-Si:H PREPARED BY PHOTO-CHEMICAL VAPOR DEPOSITION.

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作者：
Suzuki, Kazuhiko [1 ]
Aota, Katsumi [1 ]
Aihara, Takaaki [1 ]
Suzuki, Tadashi [1 ]
Kuroiwa, Koichi [1 ]
Tarui, Yasuo [1 ]
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[1] Tokyo Univ of Agriculture &, Technology, Tokyo, Jpn, Tokyo Univ of Agriculture & Technology, Tokyo, Jpn
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| 1600年 / 25期
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