Direct patterning of spin-on glass by focused ion beam irradiation

被引：0
|
作者：
机构：
[1] Koh, Young-Bum
[2] Goto, Toshikazu
[3] Yanagisawa, Junichi
[4] Gamo, Kenji
来源：
Koh, Young-Bum | 1600年 / 31期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Effect of Focused Ion Beam Irradiation on Superconducting Nanowires
    Shani, Lior
    Fried, Avital
    Fleger, Yafit
    Girshevitz, Olga
    Sharoni, Amos
    Yeshurun, Yosef
    JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 2022, 35 (03) : 657 - 661
  • [42] Fabrication of YBaCuO junctions by the irradiation of focused ion beam
    Shiga, H
    Soutome, Y
    Okabe, Y
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1999, 9 (02) : 2890 - 2893
  • [43] Effects of focused ion beam irradiation on MOS transistors
    Campbell, AN
    Peterson, KA
    Fleetwood, DM
    Soden, JM
    1997 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 35TH ANNUAL, 1997, : 72 - 81
  • [44] Charging of dielectrics under focused ion beam irradiation
    Yogev, S.
    Levin, J.
    Molotskii, M.
    Schwarzman, A.
    Avayu, O.
    Rosenwaks, Y.
    Journal of Applied Physics, 2008, 103 (06):
  • [45] Fabrication of YBaCuO junctions by the irradiation of focused ion beam
    Shiga, H.
    Soutome, Y.
    Okabe, Y.
    IEEE Transactions on Applied Superconductivity, 1999, 9 (2 III): : 2890 - 2893
  • [46] Effect of Focused Ion Beam Irradiation on Superconducting Nanowires
    Lior Shani
    Avital Fried
    Yafit Fleger
    Olga Girshevitz
    Amos Sharoni
    Yosef Yeshurun
    Journal of Superconductivity and Novel Magnetism, 2022, 35 : 657 - 661
  • [47] Charging of dielectrics under focused ion beam irradiation
    Yogev, S.
    Levin, J.
    Molotskii, M.
    Schwarzman, A.
    Avayu, O.
    Rosenwaks, Y.
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (06)
  • [48] Focused ion beam microfabrication in FoturanTM photosensitive glass
    Anthony, C. J.
    Docker, P. T.
    Prewett, P. D.
    Jiang, K.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (01) : 115 - 119
  • [49] POLYSILICON PLANARIZATION USING SPIN-ON GLASS
    RAMASWAMI, S
    NAGY, A
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (02) : 591 - 599
  • [50] 'Spin-on glass' films for semiconductor technology
    Shilova, AO
    SURFACE COATINGS INTERNATIONAL PART B-COATINGS TRANSACTIONS, 2003, 86 (03) : 195 - 202
12345