HIGH RESOLUTION FABRICATION TECHNOLOGY.

被引：0
|
作者：
Chang, T.H.P.
机构：
来源：
IAHS-AISH Publication (International Association of Hydrological Sciences-Association Internationale des Sciences Hydrologiques) | 1978年
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Recent advances in LSI technology demonstrate a continuing trend towards increased circuit complexity with reduced pattern geometries. In order to meet these developments, the need has arisen for new improved lithography systems. Several high resolution systems are being explored, including the optical systems (also X-ray) and the electron beam systems. This paper describes and assesses these different approaches.
引用
收藏
页码：473 / 476
相关论文
共 50 条
  • [41] Bodies in technology.
    Koukal, DR
    TECHNOLOGY AND CULTURE, 2002, 43 (04) : 837 - 838
  • [42] GROUP TECHNOLOGY.
    Ingram, Frederick B.
    Production & Inventory Management, 1600, 23 (04): : 19 - 34
  • [43] DENSTRATE TECHNOLOGY.
    Schmidt, W.
    Circuit World, 1987, 13 (02) : 22 - 25
  • [44] Projectile technology.
    Roth, B
    AMERICAN ANTIQUITY, 1999, 64 (03) : 561 - 562
  • [45] RADAR TECHNOLOGY.
    Heel, F.
    Solimini, D.
    Mitteilung - Deutsche Forschungs- und Versuchsanstalt fuer Luft- und Raumfahrt, 1985, : 27 - 41
  • [46] BATCHWEIGHING TECHNOLOGY.
    Peate, Julie
    Process Engineering (London), 1985, 66 (01):
  • [47] Questioning technology.
    Hartley, P
    TECHNOLOGY AND CULTURE, 2000, 41 (04) : 852 - 854
  • [48] STOL TECHNOLOGY.
    Lansing, Donald L.
    Mixson, John S.
    Brown, Thomas J.
    Drischler, Joseph A.
    Hughes, Donald L.
    Kier, David A.
    Powers, Bruce G.
    Grantham, William D.
    Nguyen, Luat T.
    Franklin, James A.
    Innis, Robert C.
    Hassell Jr., James L.
    Judd, Joseph H.
    Conner. D. William
    Schoonover Jr., W.Elliott
    NASA Special Publications, 1972,
  • [49] ETCHING TECHNOLOGY.
    Hutt, Marvin
    Water Resources and Environmental Engineering Research Report (State University of New York at Buffalo, Department of Civil Engineering), 1979,
  • [50] Meaning in technology.
    Saunders, L
    LIBRARY JOURNAL, 1999, 124 (13) : 133 - 133
12345