Application of IR variable angle spectroscopic ellipsometry to the determination of free carrier concentration depth profiles

被引：0
|
作者：
Tiwald, Thomas E. [1 ]
Thompson, Daniel W. [1 ]
Woollam, John A. [1 ]
Paulson, Wayne [1 ]
Hance, Robert [1 ]
机构：
[1] Univ of Nebraska-Lincoln, Lincoln, United States
来源：
Thin Solid Films | 1998年 / 313-314卷 / 1-2期
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摘要：
13
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页码：661 / 666
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