Study of backside laser-probe signals in MOSFETs

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Univ of Technology, Vienna, Austria [1 ]
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Microelectron Eng | / 1-4卷 / 87-94期
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This work was partly supported by the; Forschungssektion des Bundesministeriums fi~r Wissenschaft und Forschung and the; Oesellschafl fiir Mikroelektronik; Austria;
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