SYSTEMATIC ELIMINATION OF THIRD ORDER ABERRATIONS IN ELECTRON BEAM SCANNING SYSTEM.

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作者：
Hosokawa, Teruo
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来源：
Optik (Jena) | 1980年 / 56卷 / 01期
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摘要：
Elimination of the third order deflective aberrations in the magnetic scanning and focusing system is discussed. A practical design method based on the author's theory is presented. A numerical example with this method is also shown, where aberration is less than 0. 1 mu m at 7 multiplied by 7 mm**2 field corners for 5 mrad semiangle under the telecentric condition.
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页码：21 / 30
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