SYSTEMATIC ELIMINATION OF THIRD ORDER ABERRATIONS IN ELECTRON BEAM SCANNING SYSTEM.

被引：0

作者：

Hosokawa, Teruo

机构：

来源：

Optik (Jena) | 1980年 / 56卷 / 01期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Elimination of the third order deflective aberrations in the magnetic scanning and focusing system is discussed. A practical design method based on the author's theory is presented. A numerical example with this method is also shown, where aberration is less than 0. 1 mu m at 7 multiplied by 7 mm**2 field corners for 5 mrad semiangle under the telecentric condition.

引用

页码：21 / 30

共 50 条

[1] ELIMINATION OF THIRD-ORDER ABERRATIONS IN ELECTRON-BEAM SCANNING SYSTEMS
OHIWA, H
GOTO, E
ONO, A
ELECTRONICS & COMMUNICATIONS IN JAPAN, 1971, 54 (12): : 44 - 51
[2] SYSTEMATIC ELIMINATION OF 3RD ORDER ABERRATIONS IN ELECTRON-BEAM SCANNING SYSTEM
HOSOKAWA, T
OPTIK, 1980, 56 (01): : 21 - 30
[3] DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEM.
XIMEN JI-YE
LI YU
1982, V 62 (N 3): : 287 - 297
[4] ELECTRON BEAM OPTICS CALCULATIONS FOR ROTATIONALLY SYMMETRIC SYSTEMS POSSESSING THIRD ORDER ABERRATIONS
西门记业
刘志雄
JournalofElectronics(China), 1993, (04) : 331 - 343
[5] ABERRATIONS AND TOLERANCES IN A DOUBLE-DEFLECTION ELECTRON-BEAM SCANNING SYSTEM
THOMSON, MGR
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1156 - 1159
[6] Electron beam scanning system
Zavadtsev, AA
PROCEEDINGS OF THE 1997 PARTICLE ACCELERATOR CONFERENCE, VOLS 1-3: PLENARY AND SPECIAL SESSIONS ACCELERATORS AND STORAGE RINGS - BEAM DYNAMICS, INSTRUMENTATION, AND CONTROLS, 1998, : 3860 - 3862
[7] Electron beam scanning system
Russian Acad of Sciences, Moscow, Russia
Proc IEEE Part Accel Conf, (3860-3862):
[8] GEOMETRICAL CONSTRUCTION OF THE ROOT LOCUS FOR A THIRD ORDER SYSTEM.
Power, Henry M.
1600, (10):
[9] Third-order aberrations of a plane symmetric optical system
Sun Jin-Xia
Pan Guo-Qing
Liu Ying
ACTA PHYSICA SINICA, 2013, 62 (09)
[10] EXPLOSIVE INSTABILITY IN AN ELECTRON-BEAM SYSTEM.
Buts, V.A.
Izmailov, A.N.
Soviet Physics, Technical Physics (English translation of Zhurnal Tekhnicheskoi Fiziki), 1976, 21 (11): : 1449 - 1450

← 1 2 3 4 5 →