Characterization of an RF atomic nitrogen plasma source

被引：0
|
作者：
Voulot, D. [1 ]
McCullough, R.W. [1 ]
Thompson, W.R. [1 ]
Burns, D. [1 ]
Geddes, J. [1 ]
Cosimini, G.J. [2 ]
Nelson, E. [2 ]
Chow, P.P. [2 ]
Klaassen, J. [2 ]
机构：
[1] Atom. and Molec. Phys. Res. Division, Dept. of Pure and Applied Physics, Queen's University of Belfast, Belfast BT7 1NN, United Kingdom
[2] SVT Associates, Eden Prairie, MN 55344, United States
来源：
Journal of Crystal Growth | 1999年 / 201卷
关键词：
Number:; -; Acronym:; DE; NI; Sponsor: Department of Education; Northern Ireland; ESF; Sponsor: European Social Fund;
D O I：
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摘要：
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页码：399 / 401
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