共 50 条
- [21] LOW-TEMPERATURE H-ION IMPLANTATION IN ALUMINUM BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (03): : 433 - 433
- [23] INELASTIC-COLLISIONS IN HE+ + H-2 SYSTEM AT LOW-KEV ENERGIES PHYSICAL REVIEW A, 1977, 15 (06): : 2261 - 2268
- [24] Low temperature oxidation of silicon after copper ion implantation THERMODYNAMICS AND KINETICS OF PHASE TRANSFORMATIONS, 1996, 398 : 189 - 193
- [25] EXPERIMENTALLY DETERMINED DENSITY-MATRICES FOR H(N=3) FORMED IN H+-HE COLLISIONS FROM 20 TO 100 KEV PHYSICAL REVIEW A, 1990, 41 (05): : 2407 - 2421
- [26] Facile synthesis of highly stable a-Si by ion implantation of low-keV H isotopes PHYSICAL REVIEW B, 2009, 79 (23):
- [27] ABSOLUTE CROSS-SECTIONS FOR EXCITATION OF NEON BY IMPACT OF 20-180-KEV H+,H2+, AND HE+ PHYSICAL REVIEW A, 1972, 6 (04): : 1497 - &
- [28] Surface roughness study of low-temperature PECVD a-Si:H. AMORPHOUS AND NANOCRYSTALLINE SILICON-BASED FILMS-2003, 2003, 762 : 595 - 600
- [30] Evolution of defect structures in silicon after low temperature implantation of hydrogen Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 58 (01): : 163 - 166