Heterogeneous silicon crystal growth on a single crystal silicon wafer by a molten silicon spraying deposition method

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[1] Yokoyama, T.
[2] Fujiya, E.
[3] Maeda, Y.
[4] Itoh, S.
[5] Tanabe, S.
[6] Usui, T.
[7] Akahane, K.
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Yokoyama, T. | 1600年 / 99期
关键词：
Dielectric Isolation - Dislocation Densities;
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