Electric Characterization of Deposition Plasmas.

被引：0
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作者：
Lemperiere, G. [1 ]
机构：
[1] CNRS, Nantes, Fr, CNRS, Nantes, Fr
来源：
Le Vide, les couches minces | 1985年 / 41卷 / 230期
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摘要：
28
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页码：27 / 32
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