共 50 条
- [33] Influence of damage on the formation of CoSi2 by Co implantation Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1996, 114 (1-2): : 46 - 55
- [35] CONTROL OF PINHOLE FORMATION IN EPITAXIAL COSI2 FILMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (03): : 749 - 750
- [36] FORMATION OF THIN-FILMS OF COSI2 ON GAAS JOURNAL OF APPLIED PHYSICS, 1995, 77 (06) : 2435 - 2443
- [40] Thin CoSi2 formation on SiO2 with low-energy ion irradiation Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (11): : 6117 - 6122