Low-temperature formation of CoSi2 in the presence of Au

被引:0
|
作者
机构
[1] [1,Detavernier, C.
[2] Lavoie, C.
[3] D'Heurle, F.M.
[4] Bender, H.
[5] Van Meirhaeghe, R.L.
来源
Detavernier, C. (christophe.detavernier@UGent.be) | 1600年 / American Institute of Physics Inc.卷 / 95期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] Improvement of CoSi2 thermal stability by cavity formation
    Alberti, A
    La Via, F
    Ravesi, S
    Rimini, E
    APPLIED PHYSICS LETTERS, 2001, 79 (21) : 3419 - 3421
  • [32] FORMATION AND CHARACTERIZATION OF EPITAXIAL COSI2, ON SI(001)
    LAVIA, F
    SPINELLA, C
    READER, AH
    DUCHATEAU, JPWB
    HAKVOORT, RA
    VANVEEN, A
    APPLIED SURFACE SCIENCE, 1993, 73 : 108 - 116
  • [33] Influence of damage on the formation of CoSi2 by Co implantation
    Zentgraf, A.
    Gartner, K.
    Schippel, S.
    Gaiduk, P.I.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1996, 114 (1-2): : 46 - 55
  • [34] The influence of Ti capping layers on CoSi2 formation
    Detavernier, C
    Van Meirhaeghe, RL
    Cardon, F
    Donaton, RA
    Maex, K
    MICROELECTRONIC ENGINEERING, 2000, 50 (1-4) : 125 - 132
  • [35] CONTROL OF PINHOLE FORMATION IN EPITAXIAL COSI2 FILMS
    HUNT, BD
    LEWIS, N
    HALL, EL
    ROBERTSON, CD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (03): : 749 - 750
  • [36] FORMATION OF THIN-FILMS OF COSI2 ON GAAS
    HULT, M
    PERSSON, L
    ELBOUANANI, M
    ANDERSSON, M
    OSTLING, M
    LUNDBERG, N
    ZARING, C
    GEORGSSON, K
    COHEN, DD
    DYTLEWSKI, N
    JOHNSTON, PN
    WALKER, SR
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (06) : 2435 - 2443
  • [37] FORMATION OF COSI2 ON AMORPHOUS-SILICON BY RTA
    DROZDY, G
    RONKAINEN, H
    SUNI, I
    APPLIED SURFACE SCIENCE, 1989, 38 (1-4) : 72 - 79
  • [38] FORMATION OF BURIED COSI2 BY ION-IMPLANTATION
    KOHLHOF, K
    MANTL, S
    STRITZKER, B
    JAGER, W
    APPLIED SURFACE SCIENCE, 1989, 38 (1-4) : 207 - 216
  • [39] FORMATION AND STRUCTURE OF EPITAXIAL NISI2 AND COSI2
    CHEN, LJ
    MAYER, JW
    TU, KN
    THIN SOLID FILMS, 1982, 93 (1-2) : 135 - 141
  • [40] Thin CoSi2 formation on SiO2 with low-energy ion irradiation
    Matsushita, Atsushi
    Sadoh, Taizoh
    Tsurushima, Toshio
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (11): : 6117 - 6122