Low-temperature formation of CoSi2 in the presence of Au

被引:0
|
作者
机构
[1] [1,Detavernier, C.
[2] Lavoie, C.
[3] D'Heurle, F.M.
[4] Bender, H.
[5] Van Meirhaeghe, R.L.
来源
Detavernier, C. (christophe.detavernier@UGent.be) | 1600年 / American Institute of Physics Inc.卷 / 95期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Low-temperature formation of CoSi2 in the presence of Au
    Detavernier, C
    Lavoie, C
    d'Heurle, FM
    Bender, H
    Van Meirhaeghe, RL
    JOURNAL OF APPLIED PHYSICS, 2004, 95 (10) : 5340 - 5346
  • [2] LOW-TEMPERATURE TRANSPORT IN EPITAXIAL COSI2 FILMS
    DITUSA, JF
    PARPIA, JM
    PHILLIPS, JM
    PHYSICA B, 1990, 165 : 863 - 864
  • [3] LOW-TEMPERATURE SPECIFIC-HEAT OF COSI2
    BRIGGS, A
    THOMAS, O
    MADAR, R
    SENATEUR, JP
    APPLIED SURFACE SCIENCE, 1991, 53 : 240 - 242
  • [4] CoSi2 formation in the presence of carbon
    Detavernier, C
    Van Meirhaeghe, RL
    Bender, H
    Richard, O
    Brijs, B
    Maex, K
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (03) : 1207 - 1211
  • [5] LOW-TEMPERATURE AMORPHOUS-TO-CRYSTALLINE TRANSFORMATION OF COSI2 FILMS
    CROS, A
    TU, KN
    SMITH, DA
    WEISS, BZ
    APPLIED PHYSICS LETTERS, 1988, 52 (16) : 1311 - 1313
  • [6] CoSi2 formation in the presence of interfacial silicon oxide
    Detavernier, C
    Van Meirhaeghe, RL
    Cardon, F
    Donaton, RA
    Maex, K
    APPLIED PHYSICS LETTERS, 1999, 74 (20) : 2930 - 2932
  • [7] CoSi2 formation in the presence of Ti, Ta or W
    Detavernier, C
    Lavoie, C
    Van Meirhaeghe, RL
    THIN SOLID FILMS, 2004, 468 (1-2) : 174 - 182
  • [8] LOW-TEMPERATURE PROCESSING OF SHALLOW JUNCTIONS USING EPITAXIAL AND POLYCRYSTALLINE COSI2
    JONES, EC
    CHEUNG, NW
    JOURNAL OF ELECTRONIC MATERIALS, 1995, 24 (07) : 863 - 873
  • [9] Competitive metastable phase in low-temperature epitaxy of CoSi2/Si(111)
    GoncalvesConto, S
    Scharer, U
    Muller, E
    vonKanel, H
    Miglio, L
    Tavazza, F
    PHYSICAL REVIEW B, 1997, 55 (11) : 7213 - 7221
  • [10] COSI FORMATION DURING COSI2 OXIDATION
    DANTERROCHES, C
    DEBESNEST, P
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1988, (93): : 399 - 400