Novel method for the preparation of nanosized TiO2 thin films

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作者：
Univ of Brescia, Brescia, Italy [1 ]
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来源：
Adv Mater | / 4卷 / 334-337期
关键词：
Annealing - Crystal growth - Film growth - Film preparation - Heat treatment - Phase composition - Scanning electron microscopy - Spectrum analysis - Thin films - Titanium dioxide - Transmission electron microscopy - X ray diffraction;
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摘要：
Nanostructured titanium dioxide has many important applications, including several in chemical sensors, for example in 'electronic noses'. This paper reports a new method of preparing nanosized TiO2 thin films based on rf magnetron sputtering and describes the characterization of the resulting films. Results are presented for the temperature variation of the electrical response of the films to NO2, in particular the response and recovery times of the resistance of the layer.
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